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lukasc-ubc authored Feb 27, 2024
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- The Silicon Electronic Photonics Integrated Circuits (SiEPIC) fabrication program, <a href="https://siepic.ca/fabrication/">SiEPICfab</a>, presents the open electron beam lithography (EBL) fabrication process, where former and current students of <a href="https://siepic.ca/education/">SiEPIC</a> workshops and courses can submit their design for manufacturing and testing.
- More details about <a href="https://siepic.ca/openEBL/">openEBL</a>.
- This fabrication run had a deadline of February 10, 2024.
- This fabrication run had a deadline of May 18, 2024.
- The previous submission was in [February 2024](https://github.com/SiEPIC/openEBL-2024-02).

# Fabrication process: Passive Silicon
## Technical summary:
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- For example: EBeam_LukasChrostowski_rings.oas
- Upload your design(s) into the "submissions" folder, as a binary file, namely a .gds (GDSII format) or .oas (OASIS format) file.
- This can be done via the GitHub web page, by navigating to the <a href=../../tree/main/submissions>submissions folder</a>, then clicking on Add file, and Upload files.
- Click Commit changes, and wait for the verification (via github actions) to complete. This will appear as a green checkmark or red X next to your commit on GitHub.
- If there are errors, please review and correct the errors. You can run your verification locally (press V in klayout) or download the output .lydrb verification file from GitHub.
- Click Commit changes, and wait for the verification (via GitHub actions) to complete. This will appear as a green checkmark or red X next to your commit on GitHub.
- If there are errors, please review and correct the errors. You can run your verification locally (press V in KLayout) or download the output .lydrb verification file from GitHub.
- Alternatively upload your Python file, which will be compiled by a GitHub Action.
- For KLayout designs, use the "submissions/KLayout Python" folder, namely a .py (Python format) file. e.g., EBeam_LukasChrostowski_MZI.py. The Python file should save a gds or oas file into the parent "submissions" folder. The Python script needs to be executable in non-GUI mode, namely using "import klayout SiEPIC SiEPIC-EBeam-PDK"
- Create a <a href="https://help.github.com/articles/using-pull-requests/">Pull Request</a> -- this will notify the team of your contribution, which we can aggregate into the main design file
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## Latest Merge Layout File

Final layout for fabrication: [D2014_02_13_EBeam.oas](https://github.com/SiEPIC/openEBL-2024-02/raw/main/merge/D2014_02_13_EBeam.oas)

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