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SiN.lbr
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SiN.lbr
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<layer_builder>
<process_name>EBeam</process_name>
<gds_ref_frame sidewall_angle_pos_ind="0"/>
<layers>
<layer material="" layer_name="1:5" background_alpha="0.3" name="SiN_waveguide" pattern_material_index="0" process="Grow" start_position="0" pattern_alpha="0.8" enabled="1" pattern_material="Si3N4 (Silicon Nitride) - Phillip" pattern_growth_delta="-32.5e-9" start_position_auto="0" material_index="0" sidewall_angle="83" thickness="4.0e-07"/>
<layer material="Si (Silicon) - Palik" layer_name="None" background_alpha="0.1" name="wafer" pattern_material_index="0" process="Background" start_position_auto="0" start_position="-4.5e-6" pattern_alpha="0.10" enabled="1" pattern_material="" pattern_growth_delta="0" material_index="0" sidewall_angle="90" thickness="-.01e-06"/>
<layer material="SiO2 (Glass) - Palik" layer_name="None" background_alpha="0.3" name="BOX" pattern_material_index="0" process="Background" start_position="0" pattern_alpha="0.80" enabled="1" pattern_material="" pattern_growth_delta="0" start_position_auto="1" material_index="0" sidewall_angle="90" thickness="-4.5e-06"/>
<layer material="SiO2 (Glass) - Palik" layer_name="None" background_alpha="0.3" name="TOX" pattern_material_index="0" process="Background" start_position="0" pattern_alpha="0.8" enabled="1" pattern_material="" pattern_growth_delta="0" start_position_auto="1" material_index="0" sidewall_angle="90" thickness="3.0e-06"/>
</layers>
</layer_builder>